AirWorks tasks in this project:

• Support to Opto-Mechanical Design
• Mechanical design and configuration control of the Collectors
• Development of the mirror cooling system
• Materials compatibility with plasma, EUV light, vacuum
• Design of permanent and demountable joints
• Design of the Heat Exchangers
• Design of adjustable supports systems for mirrors
• Design of jigs and tools

Furthermore, AirWorks supervised then analytical and experimental development:

• 1D Simulations of the cooling system
• Experimental fluidynamics, Measurements. 1D model calibration

Main Challenges
High dimensional stability (10μm) under extreme thermal impact (10kW)
High accuracy manufacturing, assembly and co-alignment of mirrors